Physics of Microfabrication: Front End Processing

Physics of Microfabrication: Front End Processing

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This course is offered to graduates and focuses on understanding the fundamental principles of the "front-end" processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion,…

Instructor: Prof. Judy Hoyt Contributor: Prof. L. Rafael Reif


    • Apr 7, 2008 LATEST EPISODE
    • infrequent NEW EPISODES
    • 1h 12m AVG DURATION
    • 21 EPISODES


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    Latest episodes from Physics of Microfabrication: Front End Processing

    Lecture 22: Silicides, Device Contacts, Novel Gate Materials

    Play Episode Listen Later Apr 7, 2008 79:25


    Lecture 07: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defects

    Play Episode Listen Later Apr 7, 2008 71:42


    Lecture 06: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models

    Play Episode Listen Later Apr 7, 2008 74:12


    Lecture 15: Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail

    Play Episode Listen Later Apr 7, 2008 60:31


    Lecture 14: Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction

    Play Episode Listen Later Apr 7, 2008 77:27


    Lecture 05: Wafer Cleaning and Gettering - Contamination Measurement Techniques

    Play Episode Listen Later Apr 7, 2008 76:35


    Lecture 21: Etching - Poly Gate Etching, Stringers, Modeling of Etching

    Play Episode Listen Later Apr 7, 2008 72:42


    Lecture 13: Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED

    Play Episode Listen Later Apr 7, 2008 61:14


    Lecture 04: Wafer Cleaning and Gettering (cont.)

    Play Episode Listen Later Apr 7, 2008 72:03


    Lecture 12: Ion Implantation and Annealing - Analytic Models and Monte Carlo

    Play Episode Listen Later Apr 7, 2008 72:23


    Lecture 11: Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques

    Play Episode Listen Later Apr 7, 2008 77:13


    Lecture 20: Etching - Introduction

    Play Episode Listen Later Apr 7, 2008 75:11


    Lecture 03: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.); Wafer Cleaning and Gettering

    Play Episode Listen Later Apr 7, 2008 61:07


    Lecture 19: Thin Film Deposition and Epitaxy - Modeling Topography of Deposition

    Play Episode Listen Later Apr 7, 2008 72:50


    Lecture 10: Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

    Play Episode Listen Later Apr 7, 2008 76:38


    Lecture 09: Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

    Play Episode Listen Later Apr 7, 2008 79:15


    Lecture 17: Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

    Play Episode Listen Later Apr 7, 2008 70:35


    Lecture 18: Thin Film Deposition and Epitaxy - CVD Examples and PVD

    Play Episode Listen Later Apr 7, 2008 73:02


    Lecture 16: The SUPREM IV Process Simulator

    Play Episode Listen Later Apr 7, 2008 74:43


    Lecture 23: Growth and Processing of Strained Si/SiGe and Stress Effects on Devices

    Play Episode Listen Later Apr 7, 2008 73:18


    Lecture 08: Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

    Play Episode Listen Later Apr 7, 2008 63:24


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