Physics of Microfabrication: Front End Processing

Physics of Microfabrication: Front End Processing

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This course is offered to graduates and focuses on understanding the fundamental principles of the "front-end" processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion,…

Instructor: Prof. Judy Hoyt Contributor: Prof. L. Rafael Reif

Apr 7, 2008 LATEST EPISODE
infrequent NEW EPISODES
1h 12m AVG DURATION
21 EPISODES

lecture thin film sio2 diffusion annealing etching deposition wafer implantation oxidation suprem analytic stringers transient defects wafers interface topography effects oxide

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Latest episodes from Physics of Microfabrication: Front End Processing

Lecture 22: Silicides, Device Contacts, Novel Gate Materials

Play Episode Listen Later Apr 7, 2008 79:25

gate lecture materials device contacts

Lecture 07: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defects

Play Episode Listen Later Apr 7, 2008 71:42

effects lecture doping interface defects oxidation sio2

Lecture 06: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models

Play Episode Listen Later Apr 7, 2008 74:12

models lecture thin grove interface oxidation oxide sio2

Lecture 15: Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail

Play Episode Listen Later Apr 7, 2008 60:31

lecture detail simulation enhanced diffusion transient calculations

Lecture 14: Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction

Play Episode Listen Later Apr 7, 2008 77:27

model lecture enhanced diffusion defects transient

Lecture 05: Wafer Cleaning and Gettering - Contamination Measurement Techniques

Play Episode Listen Later Apr 7, 2008 76:35

cleaning lecture measurement contamination wafer

Lecture 21: Etching - Poly Gate Etching, Stringers, Modeling of Etching

Play Episode Listen Later Apr 7, 2008 72:42

gate lecture modeling poly etching stringers

Lecture 13: Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED

Play Episode Listen Later Apr 7, 2008 61:14

loss physics lecture damage implantation annealing

Lecture 04: Wafer Cleaning and Gettering (cont.)

Play Episode Listen Later Apr 7, 2008 72:03

cleaning lecture cont wafer

Lecture 12: Ion Implantation and Annealing - Analytic Models and Monte Carlo

Play Episode Listen Later Apr 7, 2008 72:23

models lecture monte carlo analytic implantation annealing

Lecture 11: Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques

Play Episode Listen Later Apr 7, 2008 77:13

scale models profile lecture atomic measurement diffusion

Lecture 20: Etching - Introduction

Play Episode Listen Later Apr 7, 2008 75:11

lecture etching

Lecture 03: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.); Wafer Cleaning and Gettering

Play Episode Listen Later Apr 7, 2008 61:07

growth basic cleaning lecture properties cont fabrication wafers

Lecture 19: Thin Film Deposition and Epitaxy - Modeling Topography of Deposition

Play Episode Listen Later Apr 7, 2008 72:50

lecture modeling deposition topography thin film

Lecture 10: Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

Play Episode Listen Later Apr 7, 2008 76:38

effects lecture assisted diffusion fermi

Lecture 09: Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

Play Episode Listen Later Apr 7, 2008 79:15

field effects lecture diffusion numerical

Lecture 17: Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

Play Episode Listen Later Apr 7, 2008 70:35

growth lecture deposition thin film

Lecture 18: Thin Film Deposition and Epitaxy - CVD Examples and PVD

Play Episode Listen Later Apr 7, 2008 73:02

lecture deposition thin film

Lecture 16: The SUPREM IV Process Simulator

Play Episode Listen Later Apr 7, 2008 74:43

lecture simulator suprem

Lecture 23: Growth and Processing of Strained Si/SiGe and Stress Effects on Devices

Play Episode Listen Later Apr 7, 2008 73:18

growth stress effects lecture processing devices strained sige

Lecture 08: Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

Play Episode Listen Later Apr 7, 2008 63:24

simple laws lecture profiles diffusion analytic abrupt

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